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Vacuum Transfer Valves

Valves with rectangular opening size for connecting vacuum chambers in clause system and inline system. Feature: Substrates processed in the vacuum or process chambers are moved through the valves. PRECESS offers customized solutions for different customer requirements.

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Series SPTVL Transfer / Insert Valve L-Motion
Series SPTVL Transfer / Insert Valve L-Motion
For Load Lock and Process Chamber Isolation
SPTVL1 × 10-9 mbar to 1.2 bar (abs) 
Series V70 Transfer / Insert Valve L-Motion
Series V70 Transfer / Insert Valve L-Motion
For Load Lock and Process Chamber Isolation
V701 × 10-9 mbar to 1.2 bar (abs) 
Series V70 L-Motion Double Opening Transfer Valve
Series V70 L-Motion Double Opening Transfer Valve
For EFEM and TM Isolation
V701 × 10-9 mbar to 1.2 bar (abs) 
Series V70 L-Motion Four Opening Transfer Valve
Series V70 L-Motion Four Opening Transfer Valve
For EFEM and TM Isolation
V701 × 10-9 mbar to 1.2 bar (abs) 
Series V72 L-Motion All Heating Transfer Valve
Series V72 L-Motion All Heating Transfer Valve
For Load Lock and Process Chamber Isolation
V721 × 10-9 mbar to 1.2 bar (abs) 
Series V73 L-Motion Double Layer Transfer Valve
Series V73 L-Motion Double Layer Transfer Valve
For Load Lock and Process Chamber Isolation
V731 × 10-9 mbar to 1.2 bar (abs) 
Series V78 Transfer / Insert Valve I-Motion
Series V78 Transfer / Insert Valve I-Motion
For Load Lock and Process Chamber Isolation
SPTVI1 × 10-9 mbar to 1.2 bar (abs) 
Series V75 Large Transfer Insert Valve L-Motion
Series V75 Large Transfer Insert Valve L-Motion
For Inline Process Chamber Isolation
V75< 1 × 10-7 mbar l/s 
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