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Vacuum RPC Valves

Valves with round opening size for connecting vacuum chambers in clause system and inline system. Feature: Process gas flows into chamber upstream isolation in SEMI production system or process gas flows out of chamber downstream isolation in SEMI production system. PRECESS offers customized solutions for different customer requirements.

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Series V41 RPC Angle Valve
Series V41 RPC Angle Valve
Process Gas Flows into Chamber Upstream Isolation
V411 × 10-9 mbar to 1.2 bar (abs) 
Series V24 RPC I-Motion Gate Valve
Series V24 RPC I-Motion Gate Valve
Process Gas Flows into Chamber Downstream Isolation
V241 × 10-9 mbar to 1.2 bar (abs)