The V75 Large Transfer Valve / Insert with L-Motion was developed for the special requirements of Solar and FPD production systems with a high cycle rate. Based on the concept of theV75 series, it combines, an outstandingly fast opening and closing movement (≤ 2 s at 150 mm opening height) with high resistance to process-related deposits that would limit the performance of standard valves. Equipped with larger pressure elements, the V75 can withstand full differential pressure on the gate in opening direction. It is thus particularly suitable for Solar, OLED, PVD and load-lock applications.

The V75 is available in the "Ultra Clean" configuration for OLED and with a high-speed option for PVD and load-lock applications.

The L-Motion technology used for the V78 is based on a modular platform concept. It provides a shock-free opening and closing motion. The smooth-running, double-acting L-Motion mechanism ensures uniform seal pressure over the entire seal surface, minimizing seal wear and potential particle release. This also reduces to a relevant extent the total cost of FFKM seals over the life of the valve.

The V75 series is available as standard transfer valve with housing or as insert version to be mounted directly into the process chamber.

The V75 Large Transfer Valve / Insert with L-Motion is tailored to the exact customer specification like all PRECESS transfer valve solutions. These customizations can include an additional process control unit, special surface treatments like hard anodized or nickel-plated aluminum, other sealing materials, vacuum gauges to detect the pressure in the valve body, bellows protected shaft feedthrough, RF & DC grounding options for valve and gate, lateral mounting position of the actuators and more.