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CATEGORIES Vacuum Control Valves Vacuum Transfer Valves Vacuum Transfer Doors Vacuum Gate Valves 3-Position Vacuum Valves Vacuum Protection Gate Valves Vacuum RPC Valves Vacuum Pendulum Valves
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Sub-Fab Systems
Sub-fab processes is challenging corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can all severely affect the functionality and reliability of vacuum valves. Key functions of vacuum valves are prevention of backflow contamination, flow rate control and pump isolation.
Home > Product Applications > Semiconductor Production > Sub-Fab Systems

Reliability, safety and availability are the key here for vacuum valves used in fabs processes. Based on our experience of vacuum valve installations in fabs processes, the comprehensive and proven PRECESS vacuum valve portfolio addresses all fabs requirements.

To find more how PRECESS vacuum valve solution can solve fabs system issues, please select from the products listed below.

RELEVANT SERIES