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Solar Thin Film Deposition
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Solar Thin Film Deposition
PECVD, LPCVD, ALD, MBE and PVD are general processes for solar panel manufacturing to produce the ultra-thin films that make up the performance of modern solar cells. All processes have in common that they take place in controlled atmospheric conditions, e.g. under argon atmosphere and under vacuum. Precise control of the vacuum and gas distribution is crucial for the efficiency of the coating process.
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The PRECESS vacuum valve is designed for thin film deposition processes for precise, stable operation even under changing process conditions. Key features include precise gas flow control even at low conductance levels, minimized residual gas and particulate emissions, and a modular design that allows the required vacuum valves to be optimally configured to meet specific process requirements.

To find more how PRECESS vacuum valve solution can solve a range of thin film deposition issues, please select from the products listed below.

RELEVANT SERIES
Series V70 L-Motion Four Opening Transfer Valve
For EFEM and TM Isolation
V701 × 10-9 mbar to 1.2 bar (abs)