The SPTVL Transfer Valve suited for corrosive processes such as etch or CVD, the technology of L-motion of the gate by a single-shaft pneumatic actuator. In a L-motion, the gate is moved vertically into close position – without any contact to the valve body – and in the final movement it is pushed horizontally to the gate seat, with the seal touching the gate seat with a fixed force, related to the connected air pressure.

To minimize particle generation and activation, the gates are fitted with insert O-ring seal, and vulcanized seals is an option. This is a highly reliable and more durable sealing solution then a standard O-ring sealing, although standard O-ring sealing is available as an option. The shaft feedthrough is sealed with highly durable metal welded bellows.

In case of power failure, the SPTVL can be mechanically locked in close and open position.

Already installed in hundreds of demanding applications in various semiconductor, Solar and Industry production processes, the SPTVL series has proven its outstanding reliability. With a robust design as well as reduced and easy maintenance, the SPTVL series convinces in all aspects.

The SPTVL Transfer Valve is always tailored to customer specifications. Nevertheless, four basic design types are predefined: two valve types with different rear side openings and two insert types with inside or outside chamber valve seat.

The valve body material options are aluminum, hard anodized, nickel-plated or stainless steel. Gate and bonnet seals are in FKM or FFKM. Other sealing materials are available on request.