The PRECESS transfer valve for substrate transfer is designed for precise, stable operation even under changing process conditions. Each series is always adapted to customer requirements. Key features include standard or special opening size, adjustable opening and closing cycles, a precise adaptive sealing that avoids over pressing, frictionless L-motion from one or two actuators, and the prevention of particle activation.

To find more how PRECESS transfer valve solution can solve substrate transfer challenges, select from the series listed below.