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CATEGORIES Vacuum Control Valves Vacuum Transfer Valves Vacuum Transfer Doors Vacuum Gate Valves 3-Position Vacuum Valves Vacuum Protection Gate Valves Vacuum RPC Valves Vacuum Pendulum Valves
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Process Control & Isolation Substrate Transfer Sub-Fab Systems
Solar Thin Film Deposition
Display Dry Etching Ion Implanting Sputtering CVD
Space Simulation High Energy Physics
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Display Dry Etching
Dry etching removes and etches a masked pattern of semiconductor material through an ion bombardment (usually a plasma of reactive gases) to dislodge material from the exposed surfaces. This process can result in condensation and high levels of by-products, which may affect vacuum valve functionality and reliability.
Home > Product Applications > Display Production > Display Dry Etching

The volume manufacturing of multilayer stacks with dry etching processes requires self-cleaning function and an overall robust tool design for high uptime. PRECESS vacuum valve solutions provide innovative functionality to ensure increased process safety and enhanced tool uptime.

To find more how PRECESS vacuum valve solution can solve dry etching process issues, please select from the products listed below.

RELEVANT SERIES
Series V70 L-Motion Double Opening Transfer Valve
For EFEM and TM Isolation
V701 × 10-9 mbar to 1.2 bar (abs)