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Series V41 RPC Angle Valve
For process gas flows into chamber upstream isolation in SEMI production system. Suitable for corrosive process such as Etch, ALD or CVD.
Home > Products > Vacuum RPC Valves > Series V41 RPC Angle Valve
Series V41 RPC Angle Valve
The V41 RPC Angle Valve series is ideal for vacuum processes with low particle solution environments such as Etch, ALD or CVD. Due to its pneumatic driven actuator the opening and closing cycle can be operated with a very smooth with extremely low minimal particle.

Already installed in hundreds of demanding applications under various process conditions, the V41 RPC Angle Valve has proven its outstanding reliability and performance. It sets the benchmark for angle valve in terms of controllability and valve performance monitoring.
The V41 RPC Angle Valve is available in sizes from DN 16 – 100 mm. Its body material is aluminum with the option of nickel-coating. Sizes DN 16 – 50 mm are also available in stainless steel. Bonnet and plate are FFKM sealed. The feedthrough is shaft sealed.

A heating jacket is an option, while a special heating is an additional option for DN 80 and DN 100.

Key features of the Series V41 RPC Angle Valve
Features:
Semi standard application (Semi E21- 94 Semi E24-92 Semi- E21.1-1296)
Particle free provide extremely clean updream air inflow chamber
1 million service life cycles
Benefits:
Pneumatic actuator double action
Smart and modularization design easy maintenance
TECHNICAL DATA
Downloads
SIZES
DN16 to DN100mm
ACTUATOR
 Pneumatic
 Double acting with position indicator
BODY MATERIAL
Aluminum or stainless steel
FEEDTHROUGH
Shaft feedthrough
LEAK RATE
 Valve Body
 < 1 × 10-9 mbar l/s

Valve Seat
 < 1 × 10-9 mbar l/s
PRESSURE RANGE
1 × 10-9 mbar to 1.2 bar (abs)
DIFFERENTIAL PRESSURE
 On the Gate
 ≤ 1.2bar

At opening
 < 30mbar
CYCLES UNTIL FIRST SERVICE
≥ 300,000
TEMPERATURE
 Valve Body
 ≤ 150 °C

Gate
 ≤ 150 °C
MATERIAL
 Valve Body, Plate
 EN AW-6061 (3.3211)

Shaft
 AlSI 304 (1.4301)
SEAL
 Bonnet
 FKM (Viton®) or FFKM Kalzez 9500

Gate
 FKM (Viton®) or FFKM Kalzez 9500
MOUNTING POSITION
Any
SOLENOID VALVE
24 VDC, 2.5 W (others on request)
POSITION INDICATOR: CONTACT RATING
 Voltage
 ≤ 50 VDC

Current
 0-50 mA

Power
 ≤ 10 W

Connection
 9 pin subminiature D
COMPRESSED AIR CONNECTION
Quick connector O.D. 4 mm

Series V41 RPC Angle Valve
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