We fabricate these ISO-F elbows for HV systems from tubing and KF flanges. The ISO-F flange is used for through- or foreline vacuum plumbing and for simple HV chamber ports.
|
SIZES |
DN63 to 250mm |
|
Flange |
ISO-F |
|
MATERIAL |
SS / Aluminum |
|
LEAK RATE |
< 1 × 10-9 mbar l/s |
|
PRESSURE RANGE |
1 × 10-9 mbar to 2 bar (abs) |