The key performance indicators for flange are reliability and variability. We fabricate these Blank Flange, KF for FV and HV systems. These flanges are used for mating ISO-KF flanges and include both the centering ring and O-ring. The ISO-KF (QF) flange is used for through- or fore line vacuum plumbing and for simple FV and HV chamber ports.
|
SIZES |
DN16 to 160mm |
|
Flange |
ISO-KF |
|
MATERIAL |
SS / Aluminum |
|
LEAK RATE |
< 1 × 10-9 mbar l/s |
|
PRESSURE RANGE |
1 × 10-9 mbar to 2 bar (abs) |