Series V80 High Vacuum Pendulum Valve
Special class of isolation control valves in which the vacuum gate is moved out of the opening cross-section by a rotational movement. Through a very fine conductance control the standard solution for downstream pressure control in process chambers. Features: Compact design, low vibration, smooth opening and closing, avoidance of particles in the process.
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Series V80 High Vacuum Pendulum Valve
The V80 HV Pendulum Isolation Valve provides reliable isolation performance combined with low particle count and low particle activation. The excellent particle performance is achieved by an exceptionally smooth opening and closing motion.

It is ideal for isolation requirements in harsh processes such as in evaporator and sputter applications. The V80 valve provides a 3-position pneumatic, single acting with closing spring or a standard pneumatic, single acting with closing spring.

With its special split body design, it allows maintenance without any disassembly of pipe connections or process chamber connections. Its slim design allows to mount the V80 directly to a process chamber, eliminating e.g. the volume normally required in a chamber - valve - pump connection.

Already installed in hundreds of batches and inline production systems around the world under various process conditions, the V80 series has proven its outstanding performance in all aspects.

The V80 HV Pendulum Isolation Valve is available in aluminum, the body hard anodized or nickel-plated with standard flange connectors in ISO-F, ASA-LP and JIS. Customer-specific flanges can be integrated. Further options are ports for roughing (by-pass), venting or for gauges, heating solution as well as a window in the plate with borosilicate or sapphire glass.
Key features of the Series V80 High Vacuum Pendulum Valve
Features:
Semi standard application (Semi E21- 94 Semi E24-92 Semi- E21.1-1296)
Shock free with minimum vibration during operation
Rotary feedthrough
DN200 to DN550 with FKM O-ring gate seal
Benefits:
Both cast and cutting aluminum material valve body
Split body design for fast and easy maintenance
TECHNICAL DATA
Downloads
SIZES

DN200 to DN550mm
ACTUATOR
Pneumatic
Single acting with closing spring (NC)
BODY MATERIAL

Aluminum
FEEDTHROUGH

Rotary feedthrough
LEAK RATE
Valve Body
< 1 × 10-9 mbar l/s
PRESSURE RANGE

1 × 10-8 mbar to 1.2 bar (abs)
DIFFERENTIAL PRESSURE
On the Gate
≤ 1.2bar

At opening
< 30mbar
CYCLES UNTIL FIRST SERVICE

≥ 200,000
TEMPERATURE
Valve Body
≤ 120 °C

Gate
≤ 120 °C
MATERIAL
Valve Body, Plate
EN AW-6061 (3.3211)
Feedthrough (parts in contact with media)

AISI 303 (1.4305), AISI 304 (1.4301)
SEAL
Bonnet
FKM (Viton®) or FFKM Kalzez 9500

Gate
FKM (Viton®) or FFKM Kalzez 9500
MOUNTING POSITION

Any
SOLENOID VALVE

24 VDC, 2.5 W (others on request)
POSITION INDICATOR: CONTACT RATING
Voltage
≤ 50 VDC

Current
0-50 mA

Power
≤ 10 W

Connection
9 pin subminiature D
COMPRESSED AIR CONNECTION

Quick connector O.D. 6 mm

Series V80 High Vacuum Pendulum Valve
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