Series SP3 High and Ultra High 3-Position Vacuum Gate Valve
The Standard for High Vacuum Isolation.
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Series SP3 High and Ultra High 3-Position Vacuum Gate Valve
The SP3 HV and UHV 3-Position Gate Valve series is equipped with VATLOCK technology which is specially developed to provide reliable sealing without any friction at the gate seal. The VATLOCK mechanism also prevents valve failures thanks to the mechanical lock-in at the closed end position.

Already installed in handers of demanding applications under various process conditions, the SP3 series has proven its outstanding reliability. It has become the standard for HV and UHV isolation in sizes from DN 63 – 320mm.With its robust, lubricant-free design and its ability to bake out up to 250 °C, it meets the highest vacuum requirements for industry and research applications.

The series SP3 provides various actuation and flanges connection design options so it’s easily integrated into any HV and UHV system. A wide range of special options like windows, ports and alternative sealing materials ensure optimal fit to the application.

The SP3 HV and UHV 3-Position Gate Valve is available as 3-position pneumatic versions with solenoid valves, either as an on-board solution or for external mounting. The solenoid valve’s standard voltage is 24 VDC but other ­voltages are available upon request. The valve position is indicated with a double position indicator (2 switches each for the “Open” and “Closed” positions) with change-over contact.

The standard options for flanges connectors are ISO-F, CF-F, ASA-L and JIS. Customer specific flanges with and without water-cooling can be integrated.
The gate sealing can be either an O-ring seal or a vulcanized seal up to DN 200 mm. The vulcanized seal is the recommended solution because of its superior performance in terms of vacuum property and reliability.

The series SP3 provides various actuation and flanges connection design options, so it’s easily integrated into any UHV system. A wide range of special options like windows, ports and alternative sealing materials ensure optimal fit to the application.
Key features of the Series SP3 High and Ultra High 3-Position Vacuum Gate Valve
Features:
Metal bonnet seal
Free of lubricants and bakeable up to 250 °C
Shock free with minimum vibration
Stainless steel material valve body for corrosion resistance
Mechanical lock in close position
Benefits:
DN63-630 with FKM O-ring gate seal
Available in ISO-F CF-F ASA-LP JIS flange
TECHNICAL DATA
Downloads
SIZES

DN63 to D320
ACTUATOR
3-Position Pneumatic
Double acting with position indicator
BODY MATERIAL

Stainless Steel
FEEDTHROUGH

Bellow
STANDARD FLANGES

ISO-F, CF-F, ASA-LP, JIS
LEAK RATE
Valve Body
< 5 × 10-10 mbar l/s
Valve Seat

< 1 × 10-9 mbar l/s
PRESSURE RANGE

1 × 10-10 mbar to 1.2 bar (abs)
DIFFERENTIAL PRESSURE
In close direction
≤ 1.2bar

At opening
< 30mbar
CYCLES UNTIL FIRST SERVICE

≥ 50,000
TEMPERATURE
Valve Body
≤ 250 °C

Gate
≤ 200 °C
MATERIAL
Valve Body, Plate
AlSI 304 (1.4301)

Shaft
AlSI 304 (1.4301)

Bellows
AISI 633(AM350)
SEAL
Bonnet
Metal

Gate
FKM (Viton®) or on request
MOUNTING POSITION

Any
SOLENOID VALVE

24 VDC, 2.5 W (others on request)
POSITION INDICATOR: CONTACT RATING
Voltage
≤ 50 VDC

Current
0-80 mA

Power
≤ 10 W

Connection
D-Sub 9P Male
COMPRESSED AIR CONNECTION

Quick connector O.D. 4 mm

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