PRECESS - PRECESS Vacuum

Series VYAK VYBK HV High Temp. Protection Inline Valve, Double Acting(With heater)

RECESS provides FV, HV High Temperature L and Y type angle valve solution for you under aggressive environment, such as Etch and CVD.
Reliable, economical, general-purpose are the key requirements for such application. PRECESS builds the standard.

Series VYAK VYBK HV High Temp. Protection Inline Valve, Double Acting(With heater)

While the temperature backing to more than 2000C, cylinder of vacuum valve is easy disable, PRECESS VYAK VYBK HV High Temp. Inline Angle Valve series delivers key performance indicators reliability and variability both. Tested in handers of demanding applications under various process conditions the VYAK VYBK series has proven its outstanding reliability and variability.

With its design in actuation pneumatic is available, various flange connections, body materials and sealing materials, nearly every requirement can be met.

The VYAK VYBK is ideal for the pumping and venting of HV systems when a low outgassing rate is important. It resists high differential pressure and is fitted with a bellows-encapsulated feedthrough for particle-sensitive applications. The bellows encapsulation also prevents pressure peaks in any valve position.

Based on a reliable and robust core design, the VYAK VYBK HV High Temp. Inline Angle Valve offers pneumatic version, it can be configured as single acting with closing spring (NC), opening spring (NO) or double acting. The pneumatic version is controlled by a solenoid valve either “on board” or in a distant location if required.

The pneumatic version is available in sizes from DN 16 to DN 100 mm.

The VYAK VYBK can be selected in stainless steel in various specifications. The standard options for flange connectors are ISO-KF or ISO-K (for the electric version only ISO-KF). The VYAK VYBK can be used in different temperature regimes depending on the sealing elastomer chosen. In addition to these standard options further customization is possible.

Key features of the Series VYAK VYBK HV High Temp. Protection Inline Valve, Double Acting(With heater)

Features:

Low cost of ownership

Inline heat jacket with extension pneumatic actuator version is available

Pneumatic drive with double action

Real bellows sealed feedthrough

Long maintenance free cycle

Benefits:

Angle and inline modularization design

Resistance against high differential pressure

Optional sealing material FKM or FFKM

Large number of design options

TECHNICAL DATA

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SIZES		DN16 to 100mm
ACTUATOR	Pneumatic	Double acting
BODY MATERIAL		Stainless Steel
FEEDTHROUGH		Bellow
LEAK RATE	Valve Body	< 1 × 10-9 mbar l/s
	Valve Seat	< 1 × 10-9 mbar l/s
PRESSURE RANGE		1 × 10-8 mbar to 2 bar (abs)
DIFFERENTIAL PRESSURE	In Opening Direction	≤ 1.2 bar Max.
	In Closing Direction	≤ 2 bar Max.
DIFFERENTIAL PRESSURE ON THE PLATE		≤ 1.2 bar
CYCLES UNTIL FIRST SERVICE		≥ 1,000,000
TEMPERATURE	Valve Body	≤ 150 °C
	Actuator	≤ 60 °C
HEATING AND COOLING RATE		≤ 30 °C/h
MATERIAL	Valve Body, Plate	AlSI 304 (1.4301)
	Shaft	AlSI 304 (1.4301)
	Bellows	AISI 633(AM350) or AISI 316L (1.4404, 1.4435)
SEAL	Bonnet	FKM (Viton®) or on request
	Gate	FKM (Viton®) or on request
MOUNTING POSITION		Any
SOLENOID VALVE		24 VDC, 2.5 W (others on request)
POSITION INDICATOR: CONTACT RATING	Voltage	≤ 24 VDC
	Current	0-50 mA
VALVE POSITION INDICATION		Visual LED Lamp

Series VYAK VYBK HV High Temp. Protection Inline Valve, Double Acting(With heater)

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