PRECESS - PRECESS Vacuum

Series VLAK VLBK HV High Temp. Protection Angle Valve, Double Acting(With heater)

PRECESS provides FV, HV High Temperature L and Y type angle valve solution for you under aggressive environment, such as Etch and CVD.
Reliable, economical, general-purpose are the key requirements for such application. PRECESS builds the standard.

Series VLAK VLBK HV High Temp. Protection Angle Valve, Double Acting(With heater)

Key features of the Series VLAK VLBK HV High Temp. Protection Angle Valve, Double Acting(With heater)

Features:

Low cost of ownership

Heat jacket with extension pneumatic actuator version is available

Pneumatic drive with double action

Real bellows sealed feedthrough

Long maintenance free cycle

Benefits:

Angle and inline modularization design

Resistance against high differential pressure

Optional sealing material FKM or FFKM

Large number of design options

TECHNICAL DATA

Downloads

SIZES		DN16 to 100mm
ACTUATOR	Pneumatic	Double acting
BODY MATERIAL		Stainless Steel
FEEDTHROUGH		Bellow
LEAK RATE	Valve Body	< 1 × 10-9 mbar l/s
Valve Seat		< 1 × 10-9 mbar l/s
PRESSURE RANGE		1 × 10-8 mbar to 2 bar (abs)
DIFFERENTIAL PRESSURE	In Opening Direction	≤ 1.2 bar Max.
	In Closing Direction	≤ 2 bar Max.
DIFFERENTIAL PRESSURE ON THE PLATE		≤ 1.2 bar
CYCLES UNTIL FIRST SERVICE		≥ 1,000,000
TEMPERATURE	Valve Body	≤ 150 °C
	Actuator	≤ 60 °C
HEATING AND COOLING RATE		≤ 30 °C/h
MATERIAL	Valve Body, Plate	AlSI 304 (1.4301)
	Shaft	AlSI 304 (1.4301)
	Bellows	AISI 633(AM350) or AISI 316L (1.4404, 1.4435)
SEAL	Bonnet	FKM (Viton®) or on request
	Gate	FKM (Viton®) or on request
MOUNTING POSITION		Any
SOLENOID VALVE		24 VDC, 2.5 W (others on request)
POSITION INDICATOR: CONTACT RATING	Voltage	≤ 24 VDC
	Current	0-50 mA
VALVE POSITION INDICATION		Visual LED Lamp

Series VLAK VLBK HV High Temp. Protection Angle Valve, Double Acting(With heater)

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