The main requirements of an angle valve in UHV applications are reliable performance, the rate of particle emission and activation, and the outgassing rate. The VLAZ UHV Angle Valve series sets the standard in these areas. The series has been designed to reduce particle emission and activation and outgassing to a minimum.

Fitted with stationary rotatable CF-flanges and bonnet metal seals the valve series is suited for bake-out temperatures up to 200°C in the manual version.

The VLAZ is ideal for the pumping and venting of vacuum systems. It resists high differential pressure. Tested in thousands of demanding applications under various process conditions the VLAZ series has proven its outstanding reliability in UHV applications. The main requirements of an angle valve in UHV applications are reliable performance, the rate of particle emission and activation, and the outgassing rate. The VLAZ UHV Angle Valve series sets the standard in these areas. The series has been designed to reduce particle emission and activation and outgassing to a minimum.

Based on a reliable and robust core design the VLAZ UHV Angle Valve offers manual actuation in sizes from DN 16mm – 63mm.

The standard flange connector is CF-R, but customer specified flanges are possible. The VLAZ is sealed with a metal bonnet seal and an FKM seal at the plate although other materials for the plate seal are an option. The feedthrough is bellows sealed.

A visual position indication as well as an electrical indicator are standard. The valve can be controlled by a solenoid valve either “on board” or in a distant location if required.

In addition to these standard options, the valve can be further customized.