Particle performance in terms of a low degree of particle activation and particle emission as well as fast, reliable opening and closing cycles are the key performance indicators for atmospheric transfer doors in semiconductor production systems.

The new V77 HV Transfer Door Insert with L-Motion combines both exceptional particle performance with optimized controllability for adjustable, fast cycle times.

An outstanding level of particle performance is achieved by optimization of various design features like a torsion bar on the plate for uniform seal compression, a fully encapsulated actuator, a lubrication free environment and a real L-Motion with an adjustable speed profile to avoid any closing shock.

The exceptional real L-Motion with an adjustable speed profile of the V77 is achieved by PRECESS’s special L-Motion technology -two separate actuators for the vertical and horizontal movement. The result: a highly reliable actuators concept with a fast, stable, adjustable and shock free movement. The benefit: Higher uptime and improved controllability.