The V76 Large Transfer Valve / Insert with T-Motion has been developed to meet the special requirements of Solar and display production systems. Developed for high cycle production systems, the V76 combines virtually particle-free operation at an outstanding fast motion time for large transfer valves (≤ 2 s with 150 mm opening height). The V76 is designed for a high uptime and reliable operation over a lifetime beyond one million cycles.

The T-Motion technology used for the V76 is based on a modular platform concept and fully optimized for the key solar and display applications:
·PECVD / ETCH: For these applications a special service feature is available on the V76 version valves allowing to maintain the gate of the process chamber, while the transfer chamber remains in production mode under vacuum. This feature is especially important, because in PECVD and ETCH processes, frequent cleaning and exchange of the gate seal is required. The soft moving, double acting T-Motion mechanism provides a uniform seal pressure along the complete seal surface, reducing the required seal load and minimizing seal wear. This reduces FFKM seal cost over the lifetime of the valve.
·OLED / PVD & Load-Lock: With a modified version of the V76, with larger pressure elements, full differential pressure can be applied. This version is available in “ultra clean” configuration for OLED and with a high-speed option for PVD and load-lock applications.

The V76 series is available as standard transfer valve with housing or as insert version to be mounted directly into the process chamber.

Already installed in hundreds of solar and display production systems under various process conditions, the V76 series has proven its outstanding performance in all aspects.

The V76 Large Transfer Valve / Insert with T-Motion is tailored to the exact customer specification like all PRECESS transfer valve solutions. These customizations can include an additional process control unit, special surface treatments like hard anodized or nickel-plated aluminum, other sealing materials, vacuum gauges to detect the pressure in the valve body, bellows protected shaft feedthrough, RF & DC grounding options for valve and gate, lateral mounting position of the actuators and more.