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PSBV Series Control Butterfly Valve
Series AB-N Control Butterfly Valve
Fast, Precise Downstream Pressure Control
Home > Products > Vacuum Control Valves > PSBV Series Control Butterfly Valve
PSBV Series Control Butterfly Valve

The AB-N Control Butterfly Valve provides pressure control performance. With its fast and precise acting motion controller (0.1s), it’s the perfect solution for pressure control in all kinds of processes such as PVD, CVD, Etch and ALD etc. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the AB-N calculates the required plate position to achieve the set pressure as fast as possible.

It is especially designed for harsh downstream processes with particle in the gas stream. The AB-N stays fully operational despite high particle loads and debris accumulation by design.

AB-N series installed in hundreds of demanding applications already under various process conditions, the AB-N series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the AB-N series convinces in all aspects.


Various design options in body material, surface treatment, elastomers, flange connections, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration into various vacuum applications.


AB-N Control Butterfly Valves is available in aluminum or stainless steel, with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated as well as special features like an integrated heater with insulation. Various FFKM/FKM elastomers are available on request (FKM is standard).

Key features of the PSBV Series Control Butterfly Valve
Features:
Excellent pressure control
Very fast operation
On-board software for local operation
Benefits:
Reliable operation in harsh process conditions
Low-cost ownership
TECHNICAL DATA
Downloads
SIZES
DN25-320
ACTUATOR
ntegrated controller with Stepper Motor
BODY MATERIAL
Aluminum or Stainless Steel
METRIC FLANGES
ISO-KF, ISO-F
LEAK RATE VALVE BODY
< 1 × 10-9 mbar l/s
PRESSURE RANGE
1 × 10-8 mbar to 1.2 bar (abs)
CYCLES UNTIL FIRST SERVICE
 Pressure Control
 2 million
TEMPERATURE
 Valve Body
 ≤ 150 °C
MATERIAL
 Valve Body, Plate
 Aluminum or Stainless Steel
Shaft
 Stainless Steel
SEAL
 Feedthrough
 FKM (others on request)
FEEDTHROUGH
Rotating shaft, direct driven
MOUNTING POSITION
Any (shaft on pump side recommended)
DN 25     ···     DN 320

MAX. DIFFERENTIAL PRESSURE
 On the plate
 1000 mbar ···    75 mbar
CONDUCTANCE
 Molecular flow
 22 l/s      ···    27000 l/s
MIN. CONTROLLABLE CONDUCTANCE Aluminum
 Stainless steel
0.15 l/s    ···    6 l/s
CLOSING OR OPENING TIME

0.09 s     ···    0.29 s
Series AB-N Control Butterfly Valve
4.14MB PDF
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SPECIFY STANDARD PRODUCT
Get to the product details to specify your requirements to get a quote or to get a specific CAD data download.
Flange
Flange
Communication
Port
Part Number
Price
 
DN25
ISO-KF
RS232
1
AB-N-025-K-N-R3-S-1
DN40
ISO-KF
RS485
1
AB-N-040-K- N -R4-S-1
DN50
ISO-KF
Logic
1
AB-N-050-K- N -LO-S-1
DN63
DeviceNET
1
AB-N-063-F- N -DN-S-1
DN80
Profibus
1
AB-N-080-F- N -PB-S-1
DN100
EtherNET
1
AB-N-100-F- N -EN-S-1
DN160
EtherCAT
1
AB-N-160-F- N -EC-S-1
DN200
CC-Link
1
AB-N-200-F- N -CC-S-1
DN250
RS232
2
AB-N-250-F- N -R3-S-2
DN320
RS485
AB-N-320-F- N -R4-S-2
CUSTOMIZED SOLUTION
Specify your customized solution.
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SELECTED APPLICATIONS Explore all applications
Sub-Fab Systems
Sub-fab processes is challenging corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can all severely affect the functionality and reliability of vacuum valves. Key functions of vacuum valves are prevention of backflow contamination, flow rate control and pump isolation.
Read more
Display Dry Etching
Dry etching removes and etches a masked pattern of semiconductor material through an ion bombardment (usually a plasma of reactive gases) to dislodge material from the exposed surfaces. This process can result in condensation and high levels of by-products, which may affect vacuum valve functionality and reliability.
Read more
Sputtering
PVD sputtering is a core process in display production. An important manufacturing step is, for example, backplane metallization, in which conductive tracks for thin-film transistors are deposited. As thin-film transistors (TFTs) get smaller and substrates get larger, the impact of controlled process conditions becomes increasingly important for consistently high manufacturing quality. PRECESS high-performance vacuum valves have a decisive influence on this.
Read more
Space Simulation
Apace simulation is one of the key solutions for space science before going to realization. Thermal vacuum chambers and thruster testing are the backbone of such tests. Since this usually requires large to very large vacuum volumes to be generated efficiently in the shortest possible time, customized vacuum valve solutions are crucial.
Read more